公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
2014 | A method integrating optimal algorithm and FEM on CMOS residual stress | Chuang, W.C.; Lin, D.T.W.; Hu, Y.-C.; Lee, H.-L.; Cheng, C.-H.; Chang, P.-Z.; Quyen, N.B.; PEI-ZEN CHANG | Journal of Mechanics | | | |
1998 | A Method Using V-Groove to Monitor the Thickness of Silicon Membrane with Micrometer Resolution | Chang, Pei-Zen ; Yang, Lung-Jieh | Journal of Micromechanics and Microengineering | | | |
1998 | A method using V-grooves to monitor the thickness of silicon membrane with μm resolution | Chang, P.-Z.; Yang, L.-J.; PEI-ZEN CHANG | Journal of Micromechanics and Microengineering | | | |
1997 | Micro electrode array - A new method for the design of electrostatic micro actuators and capacitive micro sensors | Chang, C.L.; Chang, P.Z.; Huang, R.S.; Chang, C.P.; Cheng, M.C.; PEI-ZEN CHANG | Proceedings of SPIE - The International Society for Optical Engineering | | | |
2006 | Microfabrication process of PZT thick film by aerosol deposition method | Wang, X.-Y.; Lee, C.-Y.; Chen, P.-Y.; Peng, C.-J.; Chang, P.-Z.; PEI-ZEN CHANG | Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS | | | |
2008 | A micrometer scale and low temperature PZT thick film MEMS process utilizing an aerosol deposition method | Wang, Xuan-Yu; Lee, Chi-Yuan; Peng, Cheng-Jien; Chen, Pei-Yen; PEI-ZEN CHANG | Sensors and Actuators A: Physical | 48 | 40 | |
2013 | Microstructural dielectric elastomer actuator with uniaxial in-plane contraction | Lin, S.-C.; Shih, W.-P.; Chang, P.-Z.; Wu, Ching-yi; PEI-ZEN CHANG ; WEN-PIN SHIH | Journal of Intelligent Material Systems and Structures | 3 | 2 | |
1998 | Miniature piezoelectric actuators: design concept, fabrication and performance evaluation | Lee, C. K.; Chang, S. H.; Chang, Pei-Zen ; CHIH-KUNG LEE ; PEI-ZEN CHANG | Smart Materials and Structures | 10 | 8 | |
2013 | Modeling and experimental verification on directivity of an electret cell array loudspeaker | Chen, Y.-C.; Ko, W.-C.; Chen, H.-L.; Liao, H.-C.; Wu, W.-J.; Chang, P.-Z.; WEN-JONG WU ; CHIH-KUNG LEE ; PEI-ZEN CHANG | Journal of Intelligent Material Systems and Structures | 2 | 2 | |
1997 | A new method to fabricate diffractive blazed gratings by an-isotropic etching on (110) silicon wafers | Yang, L.-J.; Chang, P.-Z.; Lee, C.-K.; CHIH-KUNG LEE ; PEI-ZEN CHANG | Proceedings of SPIE - The International Society for Optical Engineering | 4 | 0 | |
2002 | A New Transferred Ultra-thin Silicon Micropackaging | Jen-Yi Chen; Long-Sun Huang; Chia-Hua Chu; PEI-ZEN CHANG | Journal of Micromechanics and Microengineering | 20 | 16 | |
2004 | A Novel Method for Evaluating the Thickness of Silicon Membrane Using a Micromachined Acoustic Wave Sensor | Lee, Chi-Yuan; Cheng, Ying-Chou ; Wu, Tsung-Tsong ; Chen, Yung-Yu; Chen, Wen-Jong; Pao, Shih-Yung; Chang, Pei-Zen ; Chen, Ping-Hei ; Yen, Kai-Hsiang; Xiao, Fu-Yuan | Tamkang Journal of Science and Engineering | 2 | | |
2005 | Novel Method for in situ Monitoring of Thickness of Quartz during Wet Etching | Lee, Chi-Yuan; Chang, Pei-Zen ; Chen, Yung-Yu; Dai, Ching-Liang; Chen, Ping-Hei; PING-HEI CHEN ; PEI-ZEN CHANG | Japanese Journal of Applied Physics | 0 | 0 | |
2005 | A Novel Method for In-Situ Monitoring of the Thickness of a Silicon Wafer during Wet Etching | Lee, Chi Yuan; Chang, Pei Zen ; Chen, Yung Yu; Dai, Ching Liang; Wang, Xuan Yu; Chen, Ping Hei; Lee, Shuo Jen | Sensors and Materials | | | |
2006 | Novel Method for In-Situ Monitoring of Thickness of Silicon Wafer during Wet Etching | Lee, Chi-Yuan; Chang, Pei-Zen ; Chen, Yung-Yu; Dai, Ching-Liang; Wang, Xuan-Yu; Chen, Ping-Hei; Lee, Shuo-Jen | Sensors and Materials | 0 | 0 | |
2004 | A Novel Method for Measuring the Thickness of Quartz using a Plate Wave Sensor | Lee, Chi-Yuan; Cheng, Ying-Chou; Chen, Yung-Yu; Chang, Pei-Zen ; Dai, Ching-Liang; Chen, Ping-Hei; Pao, Shih-Yung; Chen, Wen-Jong | Journal of the Chinese Society of Mechanical Engineers | | | |
2013 | On the dynamics of a micro-beam driven by a traveling harmonic force | Tu, W.-H.; Chang, P.-Z.; Lee, C.-K.; CHIH-KUNG LEE ; PEI-ZEN CHANG | Advanced Materials Research | 0 | 0 | |
2023 | On the robustness and generalization of thermal error models for CNC machine tools | PO-HAN CHEN ; PEI-ZEN CHANG ; Hu, Yuh Chung; Luo, Tzuo Liang; Tsai, Chun Yu; WEI-CHANG LI | International Journal of Advanced Manufacturing Technology | | | |
2015 | Onion artificial muscles | Chen, C.-C.; Shih, W.-P.; Chang, P.-Z.; Lai, H.-M.; Chang, S.-Y.; Huang, P.-C.; WEN-PIN SHIH ; HSI-MEI LAI ; PEI-ZEN CHANG | Applied Physics Letters | 11 | 12 | |
2016 | Osteogenic differentiation of preosteoblasts on a hemostatic gelatin sponge | Kuo, Z.-K.; Lai, P.-L.; Toh, E.K.-W.; Weng, C.-H.; Tseng, H.-W.; Chang, P.-Z.; Chen, C.-C.; Cheng, C.-M.; PEI-ZEN CHANG | Scientific Reports | | | |