Issue Date | Title | Author(s) | Source | scopus | WOS | Fulltext/Archive link |
2004 | In Situ Monitoring of Silicon Membrane Thickness during Wet Etching using a Surface Acoustic Wave Sensor | Lee, Chi-Yuan; Cheng, Ying-Chou; Chen, Yung-Yu; Chang, Pei-Zen ; Wu, Tsung-Tsong ; Chen, Ping-Hei; Chen, Wen-Jong; PING-HEI CHEN ; PEI-ZEN CHANG ; TSUNG-TSONG WU | Japanese Journal of Applied Physics | 2 | 1 | |
1997 | In-situ micro strain gauges for measuring residual strain of three cmos thin films using only one maskless post-processing step | Dai, C.-L.; PEI-ZEN CHANG | Journal of the Chinese Institute of Engineers, Transactions of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an | 1 | 1 | |
2004 | In-situ Monitoring of Silicon Membrane Thickness during Wet Etching Using a SAW Sensor | Lee, Chi-Yuan; Cheng, Ying-Chou ; Wu, Tsung-Tsong ; Chen, Yung-Yu; Chen, Wen-Jong; Pao, Shih-Yung; Chang, Pei-Zen ; Chen, Ping-Hei | Japanese Journal of Applied Physics | | | |
2000 | Innovative micromachined microwave switch with very low insertion loss | Chang, C.; Chang, P.; PEI-ZEN CHANG | Sensors and Actuators, A: Physical | 67 | 55 | |
2002 | Inverse determination of coupling of modes parameters of surface acoustic wave resonators | Wu, T. T.; Wang, S. M.; Chen, Y. Y.; Wu, T. Y.; Chang, P. Z.; Huang, L. S.; Wang, C. L.; Wu, C. W.; CHIH-KUNG LEE ; PEI-ZEN CHANG ; TSUNG-TSONG WU | Japanese Journal of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers | 23 | 21 | |
2011 | A large area bimaterial sheet of piezoelectric nanogenerators for energy harvesting: Effect of RF sputtering on ZnO nanorod | Chang, C.-J.; Lee, Y.-H.; CHI-AN DAI ; Hsiao, C.-C.; Chen, S.-H.; Nurmalasari, N.P.D.; Chen, J.-C.; Cheng, Y.-Y.; Shih, Wen-Pin ; PEI-ZEN CHANG | Microelectronic Engineering | 27 | 26 | |
1990 | Levitation force and magnetic stiffness in bulk high-temperature superconductors | Chang, P.-Z.; Moon, F.C.; Hull, J.R.; Mulcahy, T.M.; PEI-ZEN CHANG | Journal of Applied Physics | 84 | 83 | |
1990 | Levitation forces, relaxation and magnetic stiffness of melt-quenched yba <inf>2</inf> Cu <inf>3</inf> O <inf>x</inf> | Moon, F.C.; Chang, P.-Z.; Hojaji, H.; Barkatt, A.; Thorpe, A.N.; PEI-ZEN CHANG | Japanese Journal of Applied Physics | 54 | 50 | |
2007 | Mechanism of giant enhancement of light emission from Au/CdSe nanocomposites | CHI-TE LIANG ; Hsieh, Ya-Ping; Wang, Xuan-Yu; Liang, Chi-Te ; Lee, Chi-Yuan; YANG-FANG CHEN ; Hu, Yuh-Chung; Chen, Yang-Fang ; PI-TAI CHOU ; Shih, Wen-Pin ; Lai, Chih-Wei; Lee, Chih-Cheng; Chou, Pi-Tai ; Huang, Jung-Tang; Chang, Pei-Zen | Nanotechnology | 67 | 55 | |
2014 | A method integrating optimal algorithm and FEM on CMOS residual stress | Chuang, W.C.; Lin, D.T.W.; Hu, Y.-C.; Lee, H.-L.; Cheng, C.-H.; Chang, P.-Z.; Quyen, N.B.; PEI-ZEN CHANG | Journal of Mechanics | 12 | 12 | |
1998 | A Method Using V-Groove to Monitor the Thickness of Silicon Membrane with Micrometer Resolution | Chang, Pei-Zen ; Yang, Lung-Jieh | Journal of Micromechanics and Microengineering | | | |
1998 | A method using V-grooves to monitor the thickness of silicon membrane with μm resolution | Chang, P.-Z.; Yang, L.-J.; PEI-ZEN CHANG | Journal of Micromechanics and Microengineering | 19 | 14 | |
1997 | Micro electrode array - A new method for the design of electrostatic micro actuators and capacitive micro sensors | Chang, C.L.; Chang, P.Z.; Huang, R.S.; Chang, C.P.; Cheng, M.C.; PEI-ZEN CHANG | Proceedings of SPIE - The International Society for Optical Engineering | 1 | 0 | |
2006 | Microfabrication process of PZT thick film by aerosol deposition method | Wang, X.-Y.; Lee, C.-Y.; Chen, P.-Y.; Peng, C.-J.; Chang, P.-Z.; PEI-ZEN CHANG | Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS | 3 | 0 | |
2008 | A micrometer scale and low temperature PZT thick film MEMS process utilizing an aerosol deposition method | Wang, Xuan-Yu; Lee, Chi-Yuan; Peng, Cheng-Jien; Chen, Pei-Yen; PEI-ZEN CHANG | Sensors and Actuators A: Physical | 48 | 40 | |
2013 | Microstructural dielectric elastomer actuator with uniaxial in-plane contraction | Lin, S.-C.; Shih, W.-P.; Chang, P.-Z.; Wu, Ching-yi; PEI-ZEN CHANG ; WEN-PIN SHIH | Journal of Intelligent Material Systems and Structures | 3 | 2 | |
1998 | Miniature piezoelectric actuators: design concept, fabrication and performance evaluation | Lee, C. K.; Chang, S. H.; Chang, Pei-Zen ; CHIH-KUNG LEE ; PEI-ZEN CHANG | Smart Materials and Structures | 10 | 8 | |
2013 | Modeling and experimental verification on directivity of an electret cell array loudspeaker | Chen, Y.-C.; Ko, W.-C.; Chen, H.-L.; Liao, H.-C.; Wu, W.-J.; Chang, P.-Z.; WEN-JONG WU ; CHIH-KUNG LEE ; PEI-ZEN CHANG | Journal of Intelligent Material Systems and Structures | 2 | 2 | |
1997 | A new method to fabricate diffractive blazed gratings by an-isotropic etching on (110) silicon wafers | Yang, L.-J.; Chang, P.-Z.; Lee, C.-K.; CHIH-KUNG LEE ; PEI-ZEN CHANG | Proceedings of SPIE - The International Society for Optical Engineering | 4 | 0 | |
2002 | A New Transferred Ultra-thin Silicon Micropackaging | Jen-Yi Chen; Long-Sun Huang; Chia-Hua Chu; PEI-ZEN CHANG | Journal of Micromechanics and Microengineering | 20 | 16 | |