公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
- | A high precision focus probe for the quality assessment of grating pitch | Chen, Yejin; Fan, K. C.; Liu, Yusheng; Cheng, Fang | Key Engineering Material | |||
2007 | Study of a noncontact type micro-CMM with arch-bridge and nanopositioning stages | Fan, Kuang-Chao; Fei, Yetai; Yu, Xiaofen; Wang, Weili; Chen, Yejin | Robotics and Computer-Integrated Manufacturing |