公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
2004 | A novel method for evaluating the thickness of silicon membrane using a micromachined acoustic wave sensor | Lee, C.-Y.; Cheng, Y.-C.; Wu, T.-T.; Chen, Y.-Y.; Chen, W.-J.; Pao, S.-Y.; Chang, P.-Z.; Chen, P.-H.; Yen, K.-H.; Xiao, F.-Y.; PING-HEI CHEN | Tamkang Journal of Science and Engineering | | | |
2015 | Anchor loss reduction of quartz resonators utilizing phononic crystals | Chen, Y.-Y.; Lin, Y.-R.; Wu, T.-T.; Pao, S.-Y.; TSUNG-TSONG WU | 2015 IEEE International Ultrasonics Symposium, IUS 2015 | | | |
2004 | In-situ Monitoring of Silicon Membrane Thickness during Wet Etching Using a SAW Sensor | Lee, C.-Y.; Cheng, Y.-C.; Wu, T.-T.; Chen, Y.-Y.; Chen, W.-J.; Pao, S.-Y.; Chang, P.-Z.; Chen, Ping-Hei | Japanese Journal of Applied Physics | | | |
2004 | A Novel Method for Evaluating the Thickness of Silicon Membrane Using a Micromachined Acoustic Wave Sensor | Lee, C.-Y.; Cheng, Y.-C.; Wu, T.-T.; Chen, Y.-Y.; Chen, W.-J.; Pao, S.-Y.; Chang, P.-Z.; Chen, P.-H.; Yen, K.-H.; Xiao, F.-Y | Tamkang Journal of Science and Engineering | | | |
2004 | Novel method for measuring the thickness of quartz using a plate wave sensor | Lee, C.-Y.; Cheng, Y.-C.; Chen, Y.-Y.; Chang, P.-Z.; Dai, C.-L.; Chen, P.-H.; Pao, S.-Y.; Chen, W.-J.; PING-HEI CHEN | Journal of the Chinese Society of Mechanical Engineers, Series C/Chung-Kuo Chi Hsueh Kung Ch'eng Hsuebo Pao | | | |
2004 | Real time monitoring of thickness of silicon membrane during wet etching using a novel surface acoustic wave sensor | Lee, C.-Y.; Wu, T.-T.; Chen, Y.-Y.; Cheng, Y.-C.; Chen, W.-J.; Pao, S.-Y.; Chang, P.-Z.; Chen, P.-H.; Yen, K.-H.; PING-HEI CHEN ; PEI-ZEN CHANG ; TSUNG-TSONG WU | Proceedings of SPIE - The International Society for Optical Engineering | 1 | 0 | |