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Tsai, M.Y.
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Showing results 3 to 3 of 3
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Issue Date
Title
Author(s)
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scopus
WOS
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2007
Single diamond dressing characteristics of CMP polyurethane pad
Liao, Y.S.; Tsai, M.Y.; Sung, J.C.; Pai, Y.L.; YUNN-SHIUAN LIAO
Key Engineering Materials