公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
1998 | A method using V-grooves to monitor the thickness of silicon membrane with μm resolution | Chang, P.-Z.; Yang, L.-J.; PEI-ZEN CHANG | Journal of Micromechanics and Microengineering | | | |
1997 | A new method to fabricate diffractive blazed gratings by an-isotropic etching on (110) silicon wafers | Yang, L.-J.; Chang, P.-Z.; Lee, C.-K.; CHIH-KUNG LEE ; PEI-ZEN CHANG | Proceedings of SPIE - The International Society for Optical Engineering | 4 | 0 | |
2001 | Phase synchronization of micro-mirror arrays using elastic linkages | Yang, L.-J.; Liu, C.-W.; Chang, P.; PEI-ZEN CHANG | Sensors and Actuators, A: Physical | | | |
2002 | The zeroth order solution of the velocity field around micro comb structures with lateral oscillation | Lee, C.-Y.; Yang, L.-J.; Chen, P.-H.; PING-HEI CHEN | Journal of the Chinese Institute of Engineers,Series A/Chung-kuo Kung Ch'eng Hsuch K'an | | | |
2002 | The Zeroth Order Solution of Velocity Field around Micro Comb Structures with Lateral Oscillation | Lee, C. Y.; Yang, L.-J.; Chen, P. H. | J. of Chin. Inst. Engr. 25: | | | |