公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
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2007 | Characterization of the Ultrathin HfO2 and Hf-Silicate Films Grown by Atomic Layer Deposition | Chen, Tze Chiang; Peng, Cheng-Yi; Tseng, Chih-Hung; Liao, Ming-Han ; Chen, Mei-Hsin; Wu, Chih-I ; Chern, Ming-Yau ; Tzeng, Pei-Jer; Liu, Chee Wee | IEEE Transactions on Electron Devices | 33 | 30 |