公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
2001 | Diffractive Laser Optical Encoder With High Tolerance to High-Speed Mechanical Runout | Wu, Chyan-Chyi; Lee, Chih-Kung ; Lu, Shui-Shong; Chen, Wen-Jong; Yang, Ching-Sang; CHIH-KUNG LEE | Journal of the Chinese Institute of Engineers | 4 | 4 | |
2004 | Fabrication of free-space MOEM Device by CMOS Process | Cheng, Ying-Chou ; Lee, Chi-Yuan; Dai, Ching-Liang; Chen, Wen-Jong; Chang, Pei-Zen ; Chen, Ping-Hei | Tamkang Journal of Science and Engineering | | | |
2004 | In Situ Monitoring of Silicon Membrane Thickness during Wet Etching using a Surface Acoustic Wave Sensor | Lee, Chi-Yuan; Cheng, Ying-Chou; Chen, Yung-Yu; Chang, Pei-Zen ; Wu, Tsung-Tsong ; Chen, Ping-Hei; Chen, Wen-Jong; PING-HEI CHEN ; PEI-ZEN CHANG ; TSUNG-TSONG WU | Japanese Journal of Applied Physics | 2 | 1 | |
2004 | In-situ Monitoring of Silicon Membrane Thickness during Wet Etching Using a SAW Sensor | Lee, Chi-Yuan; Cheng, Ying-Chou ; Wu, Tsung-Tsong ; Chen, Yung-Yu; Chen, Wen-Jong; Pao, Shih-Yung; Chang, Pei-Zen ; Chen, Ping-Hei | Japanese Journal of Applied Physics | | | |
2002 | Micro-System Displacement and Profile Measurement by an Integrated Photon Tunneling and Confocal Microscope | Chen, Wen-Jong; Huang, Long-Sun; CHIH-KUNG LEE ; Chu, Ta-Shun; Yeh, W.-F.; Lu, Shui-Shong; Cheng, Ying-Chou | The Chinese Journal of Mechanics | 2 | 1 | |
2004 | A Novel Method for Evaluating the Thickness of Silicon Membrane Using a Micromachined Acoustic Wave Sensor | Lee, Chi-Yuan; Cheng, Ying-Chou ; Wu, Tsung-Tsong ; Chen, Yung-Yu; Chen, Wen-Jong; Pao, Shih-Yung; Chang, Pei-Zen ; Chen, Ping-Hei ; Yen, Kai-Hsiang; Xiao, Fu-Yuan | Tamkang Journal of Science and Engineering | 2 | | |
2004 | A Novel Method for Measuring the Thickness of Quartz using a Plate Wave Sensor | Lee, Chi-Yuan; Cheng, Ying-Chou; Chen, Yung-Yu; Chang, Pei-Zen ; Dai, Ching-Liang; Chen, Ping-Hei; Pao, Shih-Yung; Chen, Wen-Jong | Journal of the Chinese Society of Mechanical Engineers | | | |