Issue Date | Title | Author(s) | Source | scopus | WOS | Fulltext/Archive link |
---|---|---|---|---|---|---|
- | A high precision focus probe for the quality assessment of grating pitch | Chen, Yejin; Fan, K. C.; Liu, Yusheng; Cheng, Fang | Key Engineering Material | |||
2007 | Study of a noncontact type micro-CMM with arch-bridge and nanopositioning stages | Fan, Kuang-Chao; Fei, Yetai; Yu, Xiaofen; Wang, Weili; Chen, Yejin | Robotics and Computer-Integrated Manufacturing | ![]() |