公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
2008 | Abbe singular-value decomposition: Compact Abbe's kernel generation for microlithography aerial image simulation using singular-value decomposition method | Chen, C.C.P.; Gurhanli, A.; Chiang, T.-Y.; Hong, J.-J.; Melvin, L.S.; CHUNG-PING CHEN | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | |||
2010 | Abbe-PCA-SMO: Microlithography source and mask optimization based on Abbe-PCA | Chang, J.H.-C.; Chen, C.C.-P.; Melvin, L.S.; CHUNG-PING CHEN | Proceedings of SPIE - The International Society for Optical Engineering |