公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
2009 | Abbe-PCA (Abbe-Hopkins): Microlithography aerial image analytical compact kernel generation based on principle component analysis | Tsai, M.-F.; Chang, S.-J.; Chen, C.C.P.; Melvin III, L.S.; CHUNG-PING CHEN | Proceedings of SPIE - The International Society for Optical Engineering | | | |
2009 | Abbe-PCA-SMO: Microlithography source and mask optimization based on Abbe-PCA | Chang, S.-J.; Chen, C.C.P.; Melvin III, L.S.; CHUNG-PING CHEN | Proceedings of SPIE - The International Society for Optical Engineering | | | |
2011 | Hierarchical kernel generation for SMO application | Chang, J.H.-C.; Chen, C.C.-P.; Melvin III, L.S.; CHUNG-PING CHEN | Proceedings of SPIE - The International Society for Optical Engineering | | | |