公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
2020 | Atomic Layer Densification of AlN Passivation Layer on Epitaxial Ge for Enhancement of Reliability and Electrical Performance of High-K Gate Stacks | Wang C.-I; Chang T.-J; Yin Y.-T; Jiang Y.-S; Shyue J.-J; Chen M.-J.; MIIN-JANG CHEN | ACS Applied Electronic Materials | |||
2021 | Atomic Layer Nucleation Engineering: Inhibitor-Free Area-Selective Atomic Layer Deposition of Oxide and Nitride | Chou C.-Y; Lee W.-H; Chuu C.-P; Chen T.-A; Hou C.-H; Yin Y.-T; Wang T.-Y; Shyue J.-J; Li L.-J; Chen M.-J.; MIIN-JANG CHEN | Chemistry of Materials | |||
2022 | Ferroelectric enhancement of Al-doped HfO2 thin films by rapid electron beam annealing in a low thermal budget | Wang T.-Y; Kao W.-C; Yin Y.-T; TZONG-LIN JAY SHIEH ; MIIN-JANG CHEN | Journal of the European Ceramic Society | 3 | 3 | |
2019 | High- K Gate Dielectrics Treated with in Situ Atomic Layer Bombardment | Chang T.-J; Lee W.-H; Wang C.-I; Yi S.-H; Yin Y.-T; Lin H.-C; HSIN-CHIH LIN ; MIIN-JANG CHEN | ACS Applied Electronic Materials | 19 | 19 | |
2021 | Impact of a TiN Capping Layer on Phase Transformation and Capacitance Enhancement in ZrO2 | Wang C.-Y; Wang C.-I; Yi S.-H; Chang T.-J; Chou C.-Y; Yin Y.-T; Lin H.-C; HSIN-CHIH LIN ; MIIN-JANG CHEN | ACS Applied Electronic Materials | 4 | 5 | |
2021 | Operation bandwidth of negative capacitance characterized by the frequency response of capacitance magnification in ferroelectric/dielectric stacks | Jiang Y.-S; Jeng Y.-E; Yin Y.-T; Huang K.-W; Chang T.-J; Wang C.-I; Chao Y.-T; CHAO-HSIN WU ; MIIN-JANG CHEN | Journal of Materials Chemistry C | 2 | 2 | |
2021 | Sub-7-nm textured ZrO2 with giant ferroelectricity | Huang K.-W; Yi S.-H; Jiang Y.-S; Kao W.-C; Yin Y.-T; Beck D; Korolkov V; Proksch R; Shieh J ; MIIN-JANG CHEN | Acta Materialia | 23 | 17 |