公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 |
---|---|---|---|---|---|---|
2008 | Fabrication of concave gratings by curved surface UV-nanoimprint lithography | Yung-Pin Chen; Yuet-Ping Lee; Jer-Haur Chang; Lon A. Wang; LON A. WANG | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 29 | 27 |