第 1 到 4 筆結果,共 4 筆。
公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 | |
---|---|---|---|---|---|---|---|
1 | 2005 | A MEMS micromirror fabricated using CMOS post-process | Cheng, Ying-Chou ; Dai, Ching-Liang; Lee, Chi-Yuan; Chen, Ping-Hei ; Chang, Pei-Zen | Sensors and Actuators A: Physical | 33 | 27 | |
2 | 2004 | Fabrication of free-space MOEM Device by CMOS Process | Cheng, Ying-Chou ; Lee, Chi-Yuan; Dai, Ching-Liang; Chen, Wen-Jong; Chang, Pei-Zen ; Chen, Ping-Hei | Tamkang Journal of Science and Engineering | |||
3 | 2004 | A Novel Method for Evaluating the Thickness of Silicon Membrane Using a Micromachined Acoustic Wave Sensor | Lee, Chi-Yuan; Cheng, Ying-Chou ; Wu, Tsung-Tsong ; Chen, Yung-Yu; Chen, Wen-Jong; Pao, Shih-Yung; Chang, Pei-Zen ; Chen, Ping-Hei ; Yen, Kai-Hsiang; Xiao, Fu-Yuan | Tamkang Journal of Science and Engineering | 2 | ||
4 | 2004 | In-situ Monitoring of Silicon Membrane Thickness during Wet Etching Using a SAW Sensor | Lee, Chi-Yuan; Cheng, Ying-Chou ; Wu, Tsung-Tsong ; Chen, Yung-Yu; Chen, Wen-Jong; Pao, Shih-Yung; Chang, Pei-Zen ; Chen, Ping-Hei | Japanese Journal of Applied Physics |