第 1 到 7 筆結果,共 7 筆。
公開日期 | 標題 | 作者 | 來源出版物 | scopus | WOS | 全文 | |
---|---|---|---|---|---|---|---|
1 | 2006 | Novel Method for In-Situ Monitoring of Thickness of Silicon Wafer during Wet Etching | Lee, Chi-Yuan; Chang, Pei-Zen ; Chen, Yung-Yu; Dai, Ching-Liang; Wang, Xuan-Yu; Chen, Ping-Hei; Lee, Shuo-Jen | Sensors and Materials | 0 | 0 | |
2 | 2005 | Evaluation of elastic properties of submicrometer thin films using slanted finger interdigital transducers | TSUNG-TSONG WU ; Chen, Yung-Yu; Huang, Guo-Tsai; PEI-ZEN CHANG | Journal of Applied Physics | 12 | 9 | |
3 | 2005 | Novel Method for in situ Monitoring of Thickness of Quartz during Wet Etching | Lee, Chi-Yuan; Chang, Pei-Zen ; Chen, Yung-Yu; Dai, Ching-Liang; Chen, Ping-Hei; PING-HEI CHEN ; PEI-ZEN CHANG | Japanese Journal of Applied Physics | 0 | 0 | |
4 | 2004 | A Novel Method for Measuring the Thickness of Quartz using a Plate Wave Sensor | Lee, Chi-Yuan; Cheng, Ying-Chou; Chen, Yung-Yu; Chang, Pei-Zen ; Dai, Ching-Liang; Chen, Ping-Hei; Pao, Shih-Yung; Chen, Wen-Jong | Journal of the Chinese Society of Mechanical Engineers | |||
5 | 2004 | In Situ Monitoring of Silicon Membrane Thickness during Wet Etching using a Surface Acoustic Wave Sensor | Lee, Chi-Yuan; Cheng, Ying-Chou; Chen, Yung-Yu; Chang, Pei-Zen ; Wu, Tsung-Tsong ; Chen, Ping-Hei; Chen, Wen-Jong; PING-HEI CHEN ; PEI-ZEN CHANG ; TSUNG-TSONG WU | Japanese Journal of Applied Physics | 2 | 1 | |
6 | 2004 | In-situ Monitoring of Silicon Membrane Thickness during Wet Etching Using a SAW Sensor | Lee, Chi-Yuan; Cheng, Ying-Chou ; Wu, Tsung-Tsong ; Chen, Yung-Yu; Chen, Wen-Jong; Pao, Shih-Yung; Chang, Pei-Zen ; Chen, Ping-Hei | Japanese Journal of Applied Physics | |||
7 | 2004 | A Novel Method for Evaluating the Thickness of Silicon Membrane Using a Micromachined Acoustic Wave Sensor | Lee, Chi-Yuan; Cheng, Ying-Chou ; Wu, Tsung-Tsong ; Chen, Yung-Yu; Chen, Wen-Jong; Pao, Shih-Yung; Chang, Pei-Zen ; Chen, Ping-Hei ; Yen, Kai-Hsiang; Xiao, Fu-Yuan | Tamkang Journal of Science and Engineering | 2 |