DC 欄位 | 值 | 語言 |
dc.contributor | Dept. of Electr. Eng., National Taiwan Univ. | en |
dc.contributor.author | Liu, C.W. | en_US |
dc.contributor.author | Lee, M.H. | en_US |
dc.contributor.author | Chao, C.Y. | en_US |
dc.contributor.author | Chen, C.Y. | en_US |
dc.contributor.author | Yang, C.C. | en_US |
dc.contributor.author | Chang, Y. | en_US |
dc.contributor.author | CHEE-WEE LIU | en_US |
dc.contributor.author | CHIH-CHUNG YANG | en_US |
dc.creator | Liu, C.W.; Lee, M.H.; Chao, C.Y.; Chen, C.Y.; Yang, C.C.; Chang, Y. | - |
dc.date | 1998-06 | en |
dc.date.accessioned | 2007-04-19T03:44:37Z | - |
dc.date.accessioned | 2018-07-06T11:02:25Z | - |
dc.date.available | 2007-04-19T03:44:37Z | - |
dc.date.available | 2018-07-06T11:02:25Z | - |
dc.date.issued | 1998-06 | - |
dc.identifier | N/A | en |
dc.identifier.uri | http://ntur.lib.ntu.edu.tw//handle/246246/2007041910021711 | - |
dc.format | application/pdf | en |
dc.format.extent | 599068 bytes | - |
dc.format.mimetype | application/pdf | - |
dc.language | en-US | en |
dc.language.iso | en_US | - |
dc.relation | Semiconductor Manufacturing Technology Workshop, 1998 | en |
dc.relation.ispartof | Semiconductor Manufacturing Technology Workshop | en_US |
dc.title | The design of rapid thermal process for large diameter applications [semiconductor wafer processing] | en |
dc.type | journal article | en |
dc.identifier.doi | 10.1109/SMTW.1998.722653 | en |
dc.relation.pages | - | - |
dc.identifier.uri.fulltext | http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910021711/1/00722653.pdf | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.openairetype | journal article | - |
item.languageiso639-1 | en_US | - |
item.grantfulltext | open | - |
item.cerifentitytype | Publications | - |
item.fulltext | with fulltext | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.dept | Photonics and Optoelectronics | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Center for Condensed Matter Sciences | - |
crisitem.author.dept | MediaTek-NTU Research Center | - |
crisitem.author.dept | Center for Artificial Intelligence and Advanced Robotics | - |
crisitem.author.dept | Photonics and Optoelectronics | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.orcid | 0000-0002-6439-8754 | - |
crisitem.author.orcid | 0000-0002-3476-3802 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
顯示於: | 電機工程學系
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