https://scholars.lib.ntu.edu.tw/handle/123456789/155788| Title: | Two-axis MEMS scanners with radial vertical combdrive actuators—design, theoretical analysis, and fabrication | Authors: | Tsai, Jui-che Chiou, Sheng-jie Hsieh, Tien-liang Sun, Chia-Wei Hah, Dooyoung Wu, Ming C. |
Issue Date: | 2008 | Journal Volume: | 10 | Journal Issue: | 4 | Start page/Pages: | - | Source: | Journal of Optics A: Pure and Applied Optics | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/147822 |
| Appears in Collections: | 電機工程學系 |
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