https://scholars.lib.ntu.edu.tw/handle/123456789/289057
Title: | Effects of slurry formulations on chemical-mechanical polishing of low dielectric constant polysiloxanes: Hydrido-organo siloxane and methyl silsesquioxane | Authors: | Chen, W.-C. Yen, C.-T. WEN-CHANG CHEN |
Issue Date: | 2000 | Journal Volume: | 18 | Journal Issue: | 1 | Start page/Pages: | 201-207 | Source: | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0033715453&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/289057 |
DOI: | 10.1116/1.591173 |
Appears in Collections: | 化學工程學系 |
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