https://scholars.lib.ntu.edu.tw/handle/123456789/292541
Title: | Mathematical analysis of soft baking in photolithography | Authors: | JYH-PING HSU Lin, Sung-Hwa WEN-CHANG CHEN Tseng, Shiojenn |
Issue Date: | 2001 | Journal Volume: | 89 | Journal Issue: | 3 | Start page/Pages: | 1861-1865 | Source: | Journal of Applied Physics | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0042329774&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/292541 |
DOI: | 10.1063/1.1335823 |
Appears in Collections: | 化學工程學系 |
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