https://scholars.lib.ntu.edu.tw/handle/123456789/297465
Title: | Deposition of iridium thin films using new IrI CVD precursors | Authors: | Chen, Y.-L. Liu, C.-S. Chi, Y. Carty, A.J. Peng, S.-M. Lee, G.-H. SHIE-MING PENG |
Issue Date: | 2002 | Journal Volume: | 8 | Journal Issue: | 1 | Start page/Pages: | 17-20 | Source: | Chemical Vapor Deposition | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0002451171&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/297465 |
DOI: | 10.1002/1521-3862(20020116)8:1<17 |
Appears in Collections: | 化學系 |
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