https://scholars.lib.ntu.edu.tw/handle/123456789/299262| Title: | Freestanding Microheaters in Si with High Aspect Ratio Microstructures | Authors: | W. -C. Tian S. W. Pang WEI-CHENG TIAN |
Issue Date: | May-2002 | Journal Volume: | 20 | Journal Issue: | 3 | Start page/Pages: | 1008-1012 | Source: | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/299262 | DOI: | 10.1116/1.1479363 |
| Appears in Collections: | 電機工程學系 |
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