https://scholars.lib.ntu.edu.tw/handle/123456789/302355
Title: | Deposition of Ru and RuO2 thin films employing dicarbonyl bis-diketonate ruthenium complexes as CVD source reagents | Authors: | Lai, Ying-Hui Chen, Yao-Lun Chi, Yun Liu, Chao-Shiuan Carty, Arthur J. Peng, Shie-Ming Lee, Gene-Hsiang SHIE-MING PENG |
Issue Date: | 2003 | Journal Volume: | 13 | Journal Issue: | 8 | Start page/Pages: | 1999-2006 | Source: | Journal of Materials Chemistry | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0041565413&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/302355 |
DOI: | 10.1039/b300517h |
Appears in Collections: | 化學系 |
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