https://scholars.lib.ntu.edu.tw/handle/123456789/302775
Title: | Rapid post-metallization annealing effects on high-k Y 2 O 3/Si capacitor | Authors: | Lay, TS Liao, YY Liu, WD Lai, YH Hung, Wei-Hsiu Kwo, J Hong, M Mannaerts, JP MINGHWEI HONG |
Issue Date: | 2003 | Journal Volume: | 47 | Journal Issue: | 6 | Start page/Pages: | 1021-1025 | Source: | Solid-State Electronics | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/302775 |
Appears in Collections: | 應用物理研究所 |
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