https://scholars.lib.ntu.edu.tw/handle/123456789/315173
Title: | New CVD precursors capable of depositing copper metal under mixed O 2/Ar atmosphere | Authors: | Lay, E. Song, Y.-H. Chiu, Y.-C. Lin, Y.-M. Chi, Y. Carty, A.J. Peng, S.-M. Lee, G.-H. SHIE-MING PENG |
Issue Date: | 2005 | Journal Volume: | 44 | Journal Issue: | 20 | Start page/Pages: | 7226-7233 | Source: | Inorganic Chemistry | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-26944492131&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/315173 |
DOI: | 10.1021/ic050845h |
Appears in Collections: | 化學系 |
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