https://scholars.lib.ntu.edu.tw/handle/123456789/322465
Title: | Surface integrity of silicon wafers in ultra precision machining | Authors: | Young, H.T. Liao, H.-T. Huang, H.-Y. HONG-TSU YOUNG |
Issue Date: | 2006 | Journal Volume: | 29 | Journal Issue: | 3-4 | Start page/Pages: | 372-378 | Source: | International Journal of Advanced Manufacturing Technology | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-33744535194&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/322465 |
DOI: | 10.1007/s00170-005-2508-1 |
Appears in Collections: | 機械工程學系 |
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