https://scholars.lib.ntu.edu.tw/handle/123456789/322468
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Young, H.-T. | en_US |
dc.contributor.author | Lin, C.-C. | en_US |
dc.contributor.author | Chang, M.-T. | en_US |
dc.contributor.author | Liao, H.-T. | en_US |
dc.contributor.author | HONG-TSU YOUNG | en_US |
dc.creator | HONG-TSU YOUNG;Liao, H.-T.;Chang, M.-T.;Lin, C.-C.;Young, H.-T.;HONG-TSU YOUNG | - |
dc.date.accessioned | 2018-09-10T05:53:59Z | - |
dc.date.available | 2018-09-10T05:53:59Z | - |
dc.date.issued | 2006 | - |
dc.identifier.uri | http://www.scopus.com/inward/record.url?eid=2-s2.0-84908338144&partnerID=MN8TOARS | - |
dc.identifier.uri | http://scholars.lib.ntu.edu.tw/handle/123456789/322468 | - |
dc.language | en | en |
dc.relation.ispartof | 6th International Conference European Society for Precision Engineering and Nanotechnology, 2006 | - |
dc.source | AH | - |
dc.title | A study on wafer thinning techniques with residual stress estimation | - |
dc.type | conference paper | en |
dc.relation.pages | 304-307 | - |
dc.relation.journalvolume | 2 | - |
item.fulltext | no fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.cerifentitytype | Publications | - |
item.openairetype | conference paper | - |
item.grantfulltext | none | - |
crisitem.author.orcid | 0000-0002-8866-7648 | - |
Appears in Collections: | 機械工程學系 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.