https://scholars.lib.ntu.edu.tw/handle/123456789/32833
標題: | Development of a low-cost micro-CMM for 3Dmicro/nano measurements | 作者: | Fan, K.C. Fei, Y.T. Yu, X.F. Chen, Y.J. Wang, W.L. Chen, F. Liu, Y.S. |
關鍵字: | Micro-CMM;nanometre accuracy;arch bridge;co-planar stage;focusing probe | 公開日期: | 2006 | 出版社: | Taipei:National Taiwan University Dept Phys | 起(迄)頁: | - | 來源出版物: | Meas. Sci. Technol. 17, 524–532 | 摘要: | A high-precision & low-cost micro-CMM (coordinate measuring machine) is under development. The expected measuring range is 25 × 25 × 10 mm3 & the resolution is 1 nm. In order to enhance the structural accuracy, some new ideas are integrated into the design, such as the arch-shape bridge for better stiffness & thermal accuracy, & the co-planar stage for less Abbe error. The linear diffraction grating interferometer & subdivision technique is proposed for position sensing to nanometre resolution. The focusing probe on the laser interferometer feedback spindle is structured in the Z-axis to guarantee the nanometre stability. In this report, the detailed design principles of the developed micro-CMM are described. The performance evaluation of each module of the prototype micro-CMM is presented. The positioning resolution of each axis to 1 nm can be achieved by combining the coarse & fine motion control on a piezo-ceramic linear motor. The Z-axis measurement can be controlled to within 15 nm repeatability. Parts of the positioning repeatability of the co-planar stage have been achieved to 30 nm. Some problems due to current techniques will be addressed. |
URI: | http://ntur.lib.ntu.edu.tw//handle/246246/2006111501211826 | 其他識別: | 246246/2006111501211826 |
顯示於: | 物理學系 |
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