https://scholars.lib.ntu.edu.tw/handle/123456789/331360| Title: | A novel approach of using a MBE template for ALD growth of high-$κ$ dielectrics | Authors: | Lee, KY Lee, WC Huang, ML Chang, CH Lee, YJ Chiu, YK Wu, TB Hong, M Kwo, R MINGHWEI HONG |
Issue Date: | 2007 | Journal Volume: | 301 | Start page/Pages: | 378-380 | Source: | Journal of Crystal Growth | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/331360 |
| Appears in Collections: | 應用物理研究所 |
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