https://scholars.lib.ntu.edu.tw/handle/123456789/332402| Title: | Growth of β-SiC on Si and poly-Si on β-SiC by rapid thermal chemical vapor deposition | Authors: | Liu, C.W. Sturm, J.C. CHEE-WEE LIU |
Issue Date: | 1997 | Journal Volume: | 470 | Start page/Pages: | 127-132 | Source: | Materials Research Society Symposium | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0031378421&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/332402 |
| Appears in Collections: | 電機工程學系 |
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