https://scholars.lib.ntu.edu.tw/handle/123456789/338878
Title: | Mathematical modeling of soft baking in photoresist processing | Authors: | Lin, S.-H. Liu, B.-T. Chen, W.-C. WEN-CHANG CHEN Hsu J.-P. |
Issue Date: | 1998 | Journal Volume: | 145 | Journal Issue: | 12 | Start page/Pages: | 4256-4259 | Source: | Journal of the Electrochemical Society | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-0032288057&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/338878 |
DOI: | 10.1149/1.1838947 |
Appears in Collections: | 化學工程學系 |
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