https://scholars.lib.ntu.edu.tw/handle/123456789/339307
Title: | The fabrication of silicon-based PZT microstructures using an aerosol deposition method | Authors: | Chen, Bo Lin Wang, Xuan-Yu WEN-PIN SHIH Lee, Chi-Yuan Sheu, Meei Ling Hu, Yuh-Chung Tsai, Keh Sung Shih, Wen-Pin Lan, Kuo Cheng Lee, Chih-Cheng Guan, Siao Syun Wu, Cheng Tien Huang, Jung-Tang Chen, Li Ping Chang, Pei-Zen Hung, Kuan Yu Huang, Jenq Wen Chiang, Chih Kang Liu, Shing Hwa 蔡克嵩 劉興華 姜至剛 洪冠予 黃政文 |
Issue Date: | 2008 | Journal Volume: | 18 | Journal Issue: | 5 | Source: | Journal of Micromechanics and Microengineering | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-42549133527&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/339307 |
DOI: | 10.1088/0960-1317/18/5/055034 |
Appears in Collections: | 機械工程學系 |
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