https://scholars.lib.ntu.edu.tw/handle/123456789/339309
Title: | Flip-chip bonded MEMS capacitor applied on tuning superconductive resonator | Authors: | WEN-PIN SHIH Chen, Yi-Jie Kao, Cheng-Kai Shih, Wen-Pin Chung, Sheng-Yuan Chang, Pei-Zen |
Issue Date: | 2008 | Start page/Pages: | 1004-1007 | Source: | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-50149098813&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/339309 |
DOI: | 10.1109/MEMSYS.2008.4443828 |
Appears in Collections: | 機械工程學系 |
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