https://scholars.lib.ntu.edu.tw/handle/123456789/347478
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Wang, G. J. | en_US |
dc.contributor.author | FENG-CHENG YANG | en_US |
dc.contributor.author | Wang, M. T. | en_US |
dc.contributor.author | Huang, M. L. | en_US |
dc.contributor.author | Chen, J. | en_US |
dc.contributor.author | Loh, K. N. | en_US |
dc.creator | Loh, K. N.;Chen, J.;Huang, M. L.;Wang, M. T.;Yang, F. C.;Wang, G. J.;FENG-CHENG YANG;Loh, K. N.;Chen, J.;Huang, M. L.;Wang, M. T.;Yang, F. C.;Wang, G. J. | - |
dc.date.accessioned | 2018-09-10T07:28:30Z | - |
dc.date.available | 2018-09-10T07:28:30Z | - |
dc.date.issued | 2009 | - |
dc.identifier.uri | http://www.scopus.com/inward/record.url?eid=2-s2.0-60949089197&partnerID=MN8TOARS | - |
dc.identifier.uri | http://scholars.lib.ntu.edu.tw/handle/123456789/347478 | - |
dc.language | en | en |
dc.relation.ispartof | International Journal of Advanced Manufacturing Technology | en_US |
dc.source | AH | - |
dc.title | Grey forecasting run-to-run control system in copper chemical mechanical polishing | - |
dc.type | journal article | en |
dc.identifier.doi | 10.1007/s00170-008-1452-2 | - |
dc.relation.pages | 48-56 | - |
dc.relation.journalvolume | 41 | - |
dc.relation.journalissue | 1-2 | - |
item.fulltext | no fulltext | - |
item.cerifentitytype | Publications | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.grantfulltext | none | - |
item.openairetype | journal article | - |
crisitem.author.orcid | 0000-0002-7082-7893 | - |
顯示於: | 工業工程學研究所 |
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