https://scholars.lib.ntu.edu.tw/handle/123456789/356909
Title: | Design and fabrication of a tunable superconductive resonator utilizing micromachined tunable capacitor | Authors: | Chen, Yi-Jie WEN-PIN SHIH Shih, Wen-Pin Kao, Cheng-Kai Chang, Pei-Zen |
Issue Date: | 2010 | Journal Volume: | 19 | Journal Issue: | 1 | Start page/Pages: | 129-136 | Source: | Journal of Microelectromechanical Systems | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-76349105042&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/356909 |
DOI: | 10.1109/JMEMS.2009.2037339 |
Appears in Collections: | 機械工程學系 |
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