https://scholars.lib.ntu.edu.tw/handle/123456789/359315| Title: | Beam drift detection using a two-dimensional electron beam position monitor system for multiple-electron-beam–direct-write lithography | Authors: | Sheng-Yung Chen Kuen-Yu Tsai Hoi-Tou Ng Chi-Hsiung Fan Ting-Han Pei Chieh-Hsiung Kuan Yung-Yaw Chen Yi-Hung Kuo Cheng-Ju Wu Jia-Yush Yen KUEN-YU TSAI |
Issue Date: | Jun-2010 | Start page/Pages: | 2-10 | Source: | The 54th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication | URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/359315 |
| Appears in Collections: | 電機工程學系 |
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