https://scholars.lib.ntu.edu.tw/handle/123456789/359315| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Sheng-Yung Chen | en_US |
| dc.contributor.author | Kuen-Yu Tsai | en_US |
| dc.contributor.author | Hoi-Tou Ng | en_US |
| dc.contributor.author | Chi-Hsiung Fan | en_US |
| dc.contributor.author | Ting-Han Pei | en_US |
| dc.contributor.author | Chieh-Hsiung Kuan | en_US |
| dc.contributor.author | Yung-Yaw Chen | en_US |
| dc.contributor.author | Yi-Hung Kuo | en_US |
| dc.contributor.author | Cheng-Ju Wu | en_US |
| dc.contributor.author | Jia-Yush Yen | en_US |
| dc.contributor.author | KUEN-YU TSAI | zz |
| dc.creator | Sheng-Yung Chen;Kuen-Yu Tsai;Hoi-Tou Ng;Chi-Hsiung Fan;Ting-Han Pei;Chieh-Hsiung Kuan;Yung-Yaw Chen;Yi-Hung Kuo;Cheng-Ju Wu;Jia-Yush Yen | - |
| dc.date.accessioned | 2018-09-10T08:18:22Z | - |
| dc.date.available | 2018-09-10T08:18:22Z | - |
| dc.date.issued | 2010-06 | - |
| dc.identifier.uri | http://scholars.lib.ntu.edu.tw/handle/123456789/359315 | - |
| dc.language | en | en |
| dc.relation.ispartof | The 54th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication | - |
| dc.source | AH-anncc | - |
| dc.title | Beam drift detection using a two-dimensional electron beam position monitor system for multiple-electron-beam–direct-write lithography | - |
| dc.type | conference paper | en |
| dc.relation.pages | 2-10 | - |
| item.fulltext | no fulltext | - |
| item.grantfulltext | none | - |
| item.cerifentitytype | Publications | - |
| item.openairetype | conference paper | - |
| item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
| crisitem.author.dept | Electrical Engineering | - |
| crisitem.author.dept | Electronics Engineering | - |
| crisitem.author.orcid | 0000-0002-2531-1716 | - |
| crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
| crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
| Appears in Collections: | 電機工程學系 | |
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