https://scholars.lib.ntu.edu.tw/handle/123456789/378697
Title: | Residual stress of curvature sapphire substrate with GaN film released by the application of trench structures | Authors: | Liao, M.-H. Lee, J.-J. Chen, C.-H. Kao, S.-C. Chen, K.-C. JYH-JONE LEE Liao, M.-H. |
Issue Date: | 2013 | Journal Volume: | 3 | Journal Issue: | 4 | Start page/Pages: | 239-243 | Source: | International Journal of Automation and Smart Technology | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-84905689261&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/378697 |
DOI: | 10.5875/ausmt.v3i4.202 |
Appears in Collections: | 機械工程學系 |
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