https://scholars.lib.ntu.edu.tw/handle/123456789/381322
標題: | Vertical light-emitting diodes with surface gratings and rough surfaces for effective light extraction | 作者: | Chun-Han Lin Charng-Gan Tu Horng-Shyang Chen Chieh Hsieh Chih-Yen Chen Che-Hao Liao YEAN-WOEI KIANG CHIH-CHUNG YANG |
公開日期: | 七月-2013 | 卷: | 21 | 期: | 15 | 起(迄)頁: | 17686-17694 | 來源出版物: | Optics Express | 摘要: | For enhancing the light extraction of a light-emitting diode, surface grating fabrication based on a simple method of combining photoelectrochemical (PEC) etching with phase mask interferometry has been demonstrated. To understand the optimum grating period in forming a surface grating on a vertical light-emitting diode (VLED), we construct a Llyod's interferometer within PEC electrolyte (KOH) to fabricate surface gratings of various periods on VLEDs for comparing their light extraction efficiencies. Also, to compare the effectiveness of light extraction enhancement between surface grating and rough surface, VLEDs with the rough surfaces fabricated with two different KOH wet etching methods are fabricated. The comparisons of VLED characterizations show that among those grating VLEDs, the light extraction is more effective in a VLED of a smaller grating period. Also, compared with VLEDs of rough surfaces, the grating VLEDs of short grating periods (<2 μm) have the higher light extraction efficiencies, even though the root-mean-square roughness of the rough surface is significantly larger than the grating groove depth. |
URI: | http://scholars.lib.ntu.edu.tw/handle/123456789/381322 https://www.scopus.com/record/display.uri?eid=2-s2.0-84880931956&origin=resultslist |
DOI: | 10.1364/OE.21.017686 |
顯示於: | 電機工程學系 |
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