https://scholars.lib.ntu.edu.tw/handle/123456789/387123
Title: | Fabrication of silicon-core waveguide on bulk Si substrate with mold-assisted method and KrF excimer laser reformation | Authors: | Chen, S. Hung, S.-C. Lin, S.-J. Shueh, H.-Y. Yang, S.-T. Chang, S.-K. Lin, Y.-Z. Chen, K.-Y. CHING-FUH LIN |
Issue Date: | 2014 | Start page/Pages: | 853-854 | Source: | 14th IEEE International Conference on Nanotechnology, IEEE-NANO 2014 | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-84919497245&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/387123 |
DOI: | 10.1109/NANO.2014.6968031 |
Appears in Collections: | 電機工程學系 |
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