https://scholars.lib.ntu.edu.tw/handle/123456789/391500
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Reklaitis, Ignas | en_US |
dc.contributor.author | Grinys, Tomas | en_US |
dc.contributor.author | Tomašiũnas, Rolandas | en_US |
dc.contributor.author | Puodžiunas, Tomas | en_US |
dc.contributor.author | Mažulė, Lina | en_US |
dc.contributor.author | Sirutkaitis, Valdas A. | en_US |
dc.contributor.author | Lin, Chunhan | en_US |
dc.contributor.author | CHIH-CHUNG YANG | en_US |
dc.creator | Reklaitis, I.;Grinys, T.;Toma?iunas, R.;Puod?iunas, T.;Ma?ule, L.;Sirutkaitis, V.;Lin, C.H.;Yang, C.C. | - |
dc.date.accessioned | 2018-09-10T15:20:17Z | - |
dc.date.available | 2018-09-10T15:20:17Z | - |
dc.date.issued | 2015 | - |
dc.identifier.uri | http://www.scopus.com/inward/record.url?eid=2-s2.0-84930211868&partnerID=MN8TOARS | - |
dc.identifier.uri | http://scholars.lib.ntu.edu.tw/handle/123456789/391500 | - |
dc.description.abstract | A new original method to reduce time and resource consuming photolithography mask production operations has been suggested. By means of femtosecond laser direct writing, thus, gaining cleaner surrounding than for nano- and pico-second pulse processing, a 45° angle ablation geometry has been proven. LED chip separation trenches and n-GaN layer exposure were made simultaneously saving from one fundamental processing and alignment step without adverse effect from the laser-processing on the quantum well region. © 2015 Elsevier Ltd. All rights reserved. | - |
dc.language | en | en |
dc.relation.ispartof | Optics and Lasers in Engineering | en_US |
dc.source | AH | - |
dc.subject | Femtosecond laser; GaN; Light-emitting diode; Processing; Trench | - |
dc.title | A new geometrical approach for rapid LED processing by using femtosecond laser | - |
dc.type | journal article | en |
dc.identifier.doi | 10.1016/j.optlaseng.2015.05.002 | - |
dc.identifier.scopus | 2-s2.0-84930211868 | - |
dc.relation.pages | 17-21 | - |
dc.relation.journalvolume | 74 | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.openairetype | journal article | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
crisitem.author.dept | Photonics and Optoelectronics | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.orcid | 0000-0002-3476-3802 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
顯示於: | 電機工程學系 |
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