https://scholars.lib.ntu.edu.tw/handle/123456789/393132
Title: | Stitch-aware routing for multiple e-beam lithography | Authors: | Liu, I.-J. Fang, S.-Y. Chang, Y.-W. YAO-WEN CHANG |
Issue Date: | 2015 | Journal Volume: | 34 | Journal Issue: | 3 | Start page/Pages: | 471-482 | Source: | IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems | URI: | http://www.scopus.com/inward/record.url?eid=2-s2.0-84923931702&partnerID=MN8TOARS http://scholars.lib.ntu.edu.tw/handle/123456789/393132 |
DOI: | 10.1109/TCAD.2014.2385761 |
Appears in Collections: | 電子工程學研究所 |
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