https://scholars.lib.ntu.edu.tw/handle/123456789/404489
標題: | The novel chamber hardware design to improve the thin film deposition quality in both 12? (300 mm) and 18? (450 mm) wafers with the development of 3D full chamber modeling and experimental visual technique | 作者: | Liao, M.-H. Chen, C.-H. Kao, S.-C. |
公開日期: | 2013 | 卷: | 67 | 期: | 12 | 起(迄)頁: | 393 | 來源出版物: | International Journal of Heat and Mass Transfer | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/404489 | DOI: | 10.1016/j.ijheatmasstransfer.2013.08.038 |
顯示於: | 電機工程學系 |
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