https://scholars.lib.ntu.edu.tw/handle/123456789/404492
Title: | The chemical vapor deposition chamber design to improve the thin film deposition quality in both 12? (300 mm) and 18? (450 mm) wafers with the development of 3D chamber modeling and experimental visual technique | Authors: | Liao, M.-H. Chen, C.-H. Kao, S.-C. Huang, M.-C. |
Issue Date: | 2013 | Source: | 2013 e-Manufacturing and Design Collaboration Symposium | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/404492 | DOI: | 10.1109/eMDC.2013.6756036 |
Appears in Collections: | 電機工程學系 |
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