https://scholars.lib.ntu.edu.tw/handle/123456789/404523
Title: | CVD chamber design to improve deposition quality in both 300- and 450- mm wafers with 3D-chamber modeling and experimental visual technique | Authors: | M. H.Liao C.-H. Chen S.-C. Kao M.-C. Huang |
Issue Date: | 2013 | Source: | e-Manufacturing & Design Collaboration Symposium | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/404523 |
Appears in Collections: | 電機工程學系 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.