https://scholars.lib.ntu.edu.tw/handle/123456789/407273
標題: | Nanoscale inhomogeneity and photoacid generation dynamics in extreme ultraviolet resist materials | 作者: | Wu, P.-J. Wang, Y.-F. Chen, W.-C. Wang, C.-W. Cheng, J. Chang, V. Chang, C.-Y. Lin, J. Cheng, Y.-C. |
公開日期: | 2018 | 卷: | 10586 | 起(迄)頁: | 105861O | 來源出版物: | Proceedings of SPIE - The International Society for Optical Engineering | URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85047801895&doi=10.1117%2f12.2316308&partnerID=40&md5=f91fa40082441b62db23b7effe9f7f96 https://scholars.lib.ntu.edu.tw/handle/123456789/407273 |
DOI: | 10.1117/12.2316308 |
顯示於: | 化學系 |
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