https://scholars.lib.ntu.edu.tw/handle/123456789/425022
標題: | Criteria for formation of interface dislocations in a finite thickness epilayer deposited on a substrate | 作者: | Zhang T.-Y. Lee S. Guido L.J. Hsueh C.-H. CHUN-HWAY HSUEH |
公開日期: | 1999 | 卷: | 85 | 期: | 11 | 起(迄)頁: | 7579-7586 | 來源出版物: | Journal of Applied Physics | 摘要: | The critical epilayer thickness for the formation of misfit dislocations at the interface between an epilayer and a substrate with a finite thickness is derived in the present study. The analysis is based on the energy approach, in which the self-energy of dislocation, the interaction energy between the dislocation and free surfaces, and the lattice mismatch energy of substrate and epilayer are calculated. To satisfy the free surface condition, the methodology of superposition principle and Fourier transformation are used in analyzing the stress field due to the interface dislocation. The critical epilayer thickness is compared with those reported in the literature. ? 1999 American Institute of Physics. |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/425022 | ISSN: | 00218979 | DOI: | 10.1063/1.370558 |
顯示於: | 材料科學與工程學系 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。