https://scholars.lib.ntu.edu.tw/handle/123456789/445436
Title: | Polishing effect of the plasma on the growth of YBa2Cu3O7-delta films by radio frequency sputtering | Authors: | Chou, H. Lin, P. I. Hsu, C. C. Chow, T. C. Hong, M. T. Chen, Y. C. Liu, J. R. JERRY CHENG-CHE HSU |
Issue Date: | 2002 | Journal Volume: | 20 | Journal Issue: | 2 | Start page/Pages: | 441-446 | Source: | Journal of Vacuum Science & Technology a-Vacuum Surfaces and Films | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/445436 | ISSN: | 0734-2101 | DOI: | 10.1116/1.1450579 |
Appears in Collections: | 化學工程學系 |
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