https://scholars.lib.ntu.edu.tw/handle/123456789/447608
標題: | Silicon photodiodes for electron beam position and drift detection in scanning electron microscopy and electron beam lithography system | 作者: | Kuo, Y.-H. Wu, C.-J. Yen, J.-Y. Chen, S.-Y. Tsai, K.-Y. KUEN-YU TSAI YUNG-YAW CHEN JIA-YUSH YEN |
公開日期: | 2011 | 卷: | 645 | 期: | 1 | 起(迄)頁: | 84-89 | 來源出版物: | Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/447608 | DOI: | 10.1016/j.nima.2010.12.227 |
顯示於: | 機械工程學系 |
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