https://scholars.lib.ntu.edu.tw/handle/123456789/447821
Title: | Shearing interference microscope for step-height measurements | Authors: | Tr?nh, H.-X. Lin, S.-T. Chen, L.-C. Yeh, S.-L. Chen, C.-S. Hoang, H.-H. LIANG-CHIA CHEN |
Issue Date: | 2017 | Journal Volume: | 266 | Journal Issue: | 2 | Start page/Pages: | 178-185 | Source: | Journal of Microscopy | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/447821 | DOI: | 10.1111/jmi.12527 |
Appears in Collections: | 機械工程學系 |
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