https://scholars.lib.ntu.edu.tw/handle/123456789/447836
Title: | 3-D micro surface profilometry employing novel Mirau-based lateral scanning interferometry | Authors: | Chen, L.-C. Le, M.-T. Lin, Y.-S. LIANG-CHIA CHEN |
Issue Date: | 2014 | Journal Volume: | 25 | Journal Issue: | 9 | Source: | Measurement Science and Technology | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/447836 | DOI: | 10.1088/0957-0233/25/9/094004 |
Appears in Collections: | 機械工程學系 |
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